{"id":950,"date":"2025-04-10T04:12:40","date_gmt":"2025-04-10T08:12:40","guid":{"rendered":"https:\/\/astams.com\/eng\/?page_id=950"},"modified":"2025-08-06T20:41:47","modified_gmt":"2025-08-07T00:41:47","slug":"gm-tof","status":"publish","type":"page","link":"https:\/\/astams.com\/eng\/products\/gm-tof\/","title":{"rendered":"GM-TOF"},"content":{"rendered":"

[vc_row][vc_column][vc_raw_html]JTNDZGl2JTIwY2xhc3MlM0QlMjJpbnRyb19tZW51JTIwdGFiMyUyMiUzRSUwQSUyMCUyMCUyMCUyMCUzQ2ElMjBocmVmJTNEJTIyJTJGZW5nJTJGcHJvZHVjdHMlMkZMREktVE9GJTJGJTIyJTNFTERJLVRPRiUzQyUyRmElM0UlMEElMjAlMjAlMjAlMjAlM0NhJTIwaHJlZiUzRCUyMiUyRmVuZyUyRnByb2R1Y3RzJTJGR00tVE9GJTJGJTIyJTIwY2xhc3MlM0QlMjJvbiUyMiUzRUdNLVRPRiUzQyUyRmElM0UlMEElMjAlMjAlMjAlMjAlM0NhJTIwaHJlZiUzRCUyMiUyRmVuZyUyRnByb2R1Y3RzJTJGVEdBLVRPRiUyRiUyMiUzRVRHQS1UT0YlM0MlMkZhJTNFJTIwJTIwJTIwJTIwJTBBJTNDJTJGZGl2JTNF[\/vc_raw_html]

<\/div>[\/vc_column][\/vc_row][vc_row][vc_column]
<\/span><\/div>

GM-TOF<\/h2><\/div>
Real-Time Gas Analysis System<\/div><\/div>
<\/div>[\/vc_column][\/vc_row][vc_row][vc_column width=”1\/2″][vc_single_image image=”951″ img_size=”200*400″ alignment=”center”][\/vc_column][vc_column width=”1\/2″][vc_single_image image=”952″ img_size=”200*400″ alignment=”center”][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text el_class=”sp20″]<\/p>\n
    \n
  • \u00b7 Real-time monitoring of ion signal is possible based on rapid scan of up to 8,000 spectra\/sec<\/li>\n
  • \u00b7 Gas process Optimization<\/li>\n
  • \u00b7 Real-time measurement of even low concentrations of 100 ppb gas is possible<\/li>\n
  • \u00b7 Res. ~800 M\/\u0394M. It can clearly analyze the isotope ions<\/li>\n
  • \u00b7 Implement high mass accuracy of less than 3 mDa on average over a wide range of measurements<\/li>\n
  • \u00b7 Fast process monitoring for semiconductor processes<\/li>\n<\/ul>\n

    [\/vc_column_text]

    <\/div>
    <\/div>[\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]<\/p>\n
    GM-TOF’s (Benefits)<\/span><\/div>\n

    [\/vc_column_text][vc_row_inner][vc_column_inner width=”1\/2″]

    \t\t
    [vc_single_image image=”904″ alignment=”center” css=”.vc_custom_1744138746825{margin-top: 20px !important;}”][vc_column_text css=”.vc_custom_1744138832942{margin-bottom: 20px !important;padding-bottom: 1px !important;}”]<\/p>\n

    Real-time monitoring<\/p>\n

    [\/vc_column_text]\t\t<\/div><\/div>[\/vc_column_inner][vc_column_inner width=”1\/2″]

    \t\t
    [vc_single_image image=”902″ alignment=”center” css=”.vc_custom_1744138760741{margin-top: 20px !important;}”][vc_column_text css=”.vc_custom_1744266371171{margin-top: -2px !important;margin-bottom: 20px !important;padding-right: 15px !important;padding-left: 15px !important;}”]<\/p>\n

    Wide measurement range with high accuracy<\/p>\n

    [\/vc_column_text]\t\t<\/div><\/div>[\/vc_column_inner][\/vc_row_inner]

    <\/div>[vc_row_inner][vc_column_inner width=”1\/2″]
    \t\t
    [vc_single_image image=”906″ img_size=”200*150″ alignment=”center” css=”.vc_custom_1744267085208{margin-top: 40px !important;}”][vc_column_text css=”.vc_custom_1744138863404{margin-bottom: 20px !important;padding-bottom: 2px !important;}”]<\/p>\n

    Fast scanning speed of up to 10,000 spectra per second<\/p>\n

    [\/vc_column_text]\t\t<\/div><\/div>[\/vc_column_inner][vc_column_inner width=”1\/2″]

    \t\t
    [vc_single_image image=”903″ alignment=”center” css=”.vc_custom_1744267090967{margin-top: 40px !important;}”][vc_column_text css=”.vc_custom_1744138875378{margin-bottom: 20px !important;}”]<\/p>\n

    Capable of detection in low-concentration gas environments<\/p>\n

    [\/vc_column_text]\t\t<\/div><\/div>[\/vc_column_inner][\/vc_row_inner]

    <\/div>
    <\/div>[\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]<\/p>\n
    \n
    \n

    Application<\/h4>\n<\/div>\n<\/div>\n

    [\/vc_column_text]

    <\/div>[vc_row_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1065″ img_size=”550*800″ alignment=”center”]
    <\/div>

    Etching Gas Analysis<\/h2><\/div>
    Capable of monitoring and analyzing various fluorine-containing etching gases (C\u2084F\u2086, Cyclo-C\u2084F\u2088, CH\u2082F\u2082, etc.)<\/div><\/div>[\/vc_column_inner][vc_column_inner width=”1\/2″][vc_single_image image=”1066″ img_size=”550*800″]
    <\/div>

    Inorganic and Metal Gas Analysis<\/h2><\/div>
    Capable of analyzing inorganic and metal-based gases such as silicon and tungsten<\/div><\/div>[\/vc_column_inner][\/vc_row_inner]
    <\/div>[\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]<\/p>\n
    Equipment (Specification)<\/span><\/div>\n

    [\/vc_column_text][vc_raw_html]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[\/vc_raw_html]

    <\/div>[\/vc_column][\/vc_row][vc_row][vc_column][vc_btn title=”Please contact us for more information” style=”gradient-custom” gradient_custom_color_1=”#00488b” gradient_custom_color_2=”#00488b” shape=”round” align=”center” i_align=”right” i_icon_fontawesome=”fas fa-long-arrow-alt-right” css_animation=”bounceIn” add_icon=”true” smooth_scroll=”true” link=”url:%2Feng%2Fsupport%2Finquiry%2F|||”][\/vc_column][\/vc_row]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

    [vc_row][vc_column][vc_raw_html]JTNDZGl2JTIwY2xhc3MlM0QlMjJpbnRyb19tZW51JTIwdGFiMyUyMiUzRSUwQSUyMCUyMCUyMCUyMCUzQ2ElMjBocmVmJTNEJTIyJTJGZW5nJTJGcHJvZHVjdHMlMkZMREktVE9GJTJGJTIyJTNFTERJLVRPRiUzQyUyRmElM0UlMEElMjAlMjAlMjAlMjAlM0NhJTIwaHJlZiUzRCUyMiUyRmVuZyUyRnByb2R1Y3RzJTJGR00tVE9GJTJGJTIyJTIwY2xhc3MlM0QlMjJvbiUyMiUzRUdNLVRPRiUzQyUyRmElM0UlMEElMjAlMjAlMjAlMjAlM0NhJTIwaHJlZiUzRCUyMiUyRmVuZyUyRnByb2R1Y3RzJTJGVEdBLVRPRiUyRiUyMiUzRVRHQS1UT0YlM0MlMkZhJTNFJTIwJTIwJTIwJTIwJTBBJTNDJTJGZGl2JTNF[\/vc_raw_html][\/vc_column][\/vc_row][vc_row][vc_column][\/vc_column][\/vc_row][vc_row][vc_column width=”1\/2″][vc_single_image image=”951″ img_size=”200*400″ alignment=”center”][\/vc_column][vc_column width=”1\/2″][vc_single_image image=”952″ img_size=”200*400″ alignment=”center”][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text el_class=”sp20″] \u00b7 Real-time monitoring of ion signal is possible based on rapid scan of up to 8,000 spectra\/sec \u00b7 Gas process Optimization \u00b7 Real-time measurement of even low concentrations of 100 ppb gas is possible \u00b7 Res. ~800 M\/\u0394M. It can clearly analyze the isotope ions…<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":129,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"template-microsite.php","meta":{"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"class_list":["post-950","page","type-page","status-publish","hentry","description-off"],"_links":{"self":[{"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/pages\/950","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/comments?post=950"}],"version-history":[{"count":12,"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/pages\/950\/revisions"}],"predecessor-version":[{"id":1138,"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/pages\/950\/revisions\/1138"}],"up":[{"embeddable":true,"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/pages\/129"}],"wp:attachment":[{"href":"https:\/\/astams.com\/eng\/wp-json\/wp\/v2\/media?parent=950"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}