GM-TOF

Real-Time Gas Analysis System

· Real-time monitoring of ion signal is possible based on rapid scan of up to 10,000 spectra/sec
· Gas process Optimization
· Real-time measurement of even low concentrations of 100 ppb gas is possible
· Res. ~800 M/ΔM. It can clearly analyze the isotope ions
· Implement high mass accuracy of less than 3 mDa on average over a wide range of measurements
· Fast process monitoring for semiconductor processes

GM-TOF’s (Benefits)

Real-time monitoring

Wide measurement range with high accuracy

Fast scanning speed of up to 10,000 spectra per second

Capable of detection in low-concentration gas environments

Etching Gas Analysis

Capable of monitoring and analyzing various fluorine-containing etching gases (C₄F₆, Cyclo-C₄F₈, CH₂F₂, etc.)

Capable of analyzing inorganic and metal-based gases such as silicon and tungsten

Equipment (Specification)